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• Airgard Home | Point of use (POU) wet scrubber and gas abatement solutions for semiconductor process

  Airgard is a leading supplier of wet scrubbers to remove water-soluable gasses in semiconductor and solar industry processes, using patented non-clogging gas inlet devices, high-flow spray chambers an...

• Airgard Encompass | Point of use (POU) wet scrubber and gas abatement solutions for semiconductor

  Encompass The Encompass is a new option for semiconductor exhaust management. The combination of two scrubber technologies (Wet + Burn-Wet) into a single platform allows for the efficient removal of w...

• Airgard About | Point of use (POU) wet scrubber and gas abatement solutions for semiconductor

  AIRGARD, Inc. was founded in 1988 by Mark and Kris Johnsgard. Prior to that time, the brothers worked as process engineers in the semiconductor industry where they became focused on the severe problem...

• Airgard Team | Point of use (POU) wet scrubber and gas abatement solutions for semiconductor process

  Airgard Inc. Fred brings over 40 years of experience in the semiconductor and OEM tool industries specializing in fluid delivery, automation and electrical engineer...

• Airgard Cyclone XL | Point of use (POU) wet scrubber and gas abatement solutions for semiconductor

  Cyclone XL The Cyclone XL features a coarse-spray, high-flow nozzle that coats the first scrubbing chamber and removes bulk impurities. Strategic position increases efficiency, minimizes water use and...

• AIRGARD Wet-Burn-Wet Case Study

  Airgard's point-of-use fume scrubber can reduce a process tool's scrubber-related downtime to zero. Whether running epitaxial, metal etch, poly etch or CVD, the patented scrubbing technology, automate...